加拿大Ldetek色谱仪MultiDetek2超高纯气体B2H6中微量杂质分析用于半导体行业

加拿大Ldetek色谱仪MultiDetek2高纯气体分析色谱仪适用于高纯氢、氧、氩、氮、氦、氖、氪、氙、二氧化碳等气体中痕量杂质的检测，仪器配备高灵敏度的氦离子化（PDHID）检测器，采用中心切割与反吹技术，配置具有吹扫保护气路的进样切换阀和进口氦气纯化器，通过无死体积取样或在线进样方式，一次性完成上述高纯气体中H2、O2（Ar）、N2、CH4、CO、CO2等常见杂质或C1-C4等碳氢化合物的检测，检测限达ppb级，重复性RSD≤1％。

B2H6乙硼烷是一种无机化合物，是目前能分离出的*简单的硼烷，化学式为B2H6，常温下为无色气体，用作火箭和导弹的高能燃料，也用于有机合成。
主要用作高纯度硼单晶及十硼氢的原料，也用作半导体工业的掺杂源。可用作火箭和导弹的高能燃料，也可用于半导体生产，硅和锗的外延生长、钝化、扩散和离子注入。用于制药、金属焊接和有机合成等领域。加拿大Ldetek色谱仪MultiDetek2超高纯气体B2H6中微量杂质分析用于半导体行业

乙硼烷（B2H6）的半导体行业要求测量低至亚ppb的痕量杂质。这种非常活泼的气体在电子和光伏工业中用作半导体掺杂剂。

LDETEK整体解决方案加拿大Ldetek色谱仪MultiDetek2超高纯气体B2H6中微量杂质分析用于半导体行业

MultiDetek2气相色谱仪配置有一个通道用于轻杂质，另一个通道用于重组分杂质测量。两个通道均采用带氦的PED作为载体气源。
The MultiDetek2 gas chromatograph is configured with one channel for the light impurities and another channel for the heavier  impurities to measure. Both channels used a PED with Helium as carrier gas source.

在这里使用反应强的样品气体乙硼烷，众所周知它也会产生弱酸，安装在每个通道中的分离柱和探测器被安装在反冲排气配置的预柱单独保护。保护柱和反冲/注入隔膜阀采用Hastelloy结构，以与样品气体的侵袭性兼容。
Working here with the very reactive sample gas B2H6, which is also well known to generate weak acids, the separation columns and  the detectors mounted in each channel are individually protected with a pre-column mounted in a backflush to vent configuration. The  protection columns and the backflush/injection diaphragm valves are constructed with Hastelloy to be compatible with the aggressivity  of the sample gas.

除此之外，MultiDetek2还配备了一个集成流选择器系统，该系统也采用Hastelloy材料制造。选择器系统允许从B2H6流切换至量程气，以进行校准/验证。在气流选择器系统中增加了一个额外的入口，以便在每次分析之间将样品气体切换为惰性气体（在这种情况下为氦气）。此功能用于保护注射阀和取样回路免受样气的侵蚀。通过这种配置，我们避免了流道的腐蚀和退化。加拿大Ldetek色谱仪MultiDetek2超高纯气体B2H6中微量杂质分析用于半导体行业
On top of that, the MultiDetek2 is equipped with an integrated stream selector system also constructed with Hastelloy material. The  stream selector system allows to switch from stream B2H6 along to Span gas for calibration/validation purpose. An extra inlet has been  added to the stream selector system to switch the sample gas between each analysis to an inert gas being helium in this case. This  feature is used to protect the injection valves and sampling loops from the aggressivity of the sample gas. By this type of configuration,  we keep the corrosion and degradation of the flow path away.

色谱图：微量H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11中的杂质二硼烷（B2H6）
Chromatogram: Trace H2-CO2-B4H10-Ar-N2-CH4- B5H9-CO-B5H11 impurities in  Diborane (B2H6)

检测限 （基于空白噪声级的3倍）
Limit of detection (based on 3 times the noise level from a blank)

结论

使用一个单元MultiDetek2 GC内的PlasmaDetek2检测器，可以对二硼烷（B2H6）中的痕量ppb/ppm杂质H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11杂质进行分析。分析时间少于15分钟。该装置配置有Hastelloy和涂层不锈钢阀门/配件/柱和管道的组合，以与样气的腐蚀性和酸性兼容。使用合适的材料，该系统坚固可靠，可**运行多年。该装置对每种杂质使用4-20mA输出，并使用Modbus协议进行数据传输。我们的LDGSS流选择器系统也被用于允许在不同的流之间切换。LDGSS还配置了Hastelloy材料，以与样气的腐蚀性兼容。加拿大Ldetek色谱仪MultiDetek2超高纯气体B2H6中微量杂质分析用于半导体行业

Using the PlasmaDetek2 detector inside one-unit MultiDetek2 GC, the analysis of trace ppb/ppm impurities H2-CO2-B4H10-Ar-N2-CH4-B5H9-CO-B5H11 impurities in Diborane (B2H6) can be performed. The analysis time is less than 15 minutes. The unit was configured with a combination of Hastelloy and coated stainless steel valves/fittings/columns and tubing to be compatible with the aggressive and acid nature of the sample gas.Using the proper material,the system is robust and safe to operate for years.The unit uses 4-20mA outputs for each impurity and also the Modbus protocol for data transmission. Our LDGSS stream selector system has been used as well to allow switching across the different streams. The LDGSS also has been configured with Hastelloy material to be  compatible with the aggressivity of the sample gas.

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